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Nova Measuring Instruments, Inc

Adrian S. Wilson, President and General Manager, Materials Metrology Division

Fostering a Culture of Collaboration and Innovation in Materials Metrology

Fostering a Culture of Collaboration and Innovation in Materials Metrology

Adrian S. Wilson

Materials Metrology Builder

Adrian Wilson is a seasoned senior executive with nearly three decades of leadership experience in startups and multinational divisions. As the President and General Manager of Nova Measuring Instruments' Materials Metrology Division, he embodies C-Suite strategic leadership with an entrepreneurial spirit. Wilson excels in optimizing go-to-market strategies, product lines, competitive analysis, tech planning, and business development. His strong communication skills drive cultural change across the organization. Wilson’s market expertise spans Wafer Front End, Wafer Back End, Wafer Test, IC Packaging, PCB Assembly, Medical Device, Aerospace/Military, and Automotive sectors.

Please tell our readers about your key roles and responsibilities at your organization.

I actually have two primary roles. First, I serve as the General Manager of the Materials Metrology Division, overseeing all operational aspects such as research and development, supply chain, manufacturing, marketing, applications, HR, finance, and sales and service. My division focuses on manufacturing materials metrology products and capital equipment for measuring 300 millimeter wafers.

The second aspect of my role is as the President of the North American entity. In this capacity, I ensure that our organization in North America has the necessary facilities, infrastructure, and support services in place, including matters like insurance and payroll. Essentially, I provide support to the sales and service arm of our corporation operating in North America.

Lastly, I also hold a management position within the broader Nova Limited entity, which is headquartered in Israel.

What are some of the major challenges and trends that you see that you've observed and that have impacted the industry lately?

First and foremost, it's widely recognized in the industry that the demand for shrinking devices and increasing transistor density per unit area is a well-established trend, as evidenced by Moore’s Law. Our customers, by way of example in the memory sector, must stay competitive by consistently enhancing the bit density of their memory devices. This drive for increased density leads to the continual reduction in transistor size and equivalent scaling using combinations of novel geometries and materials. 

This journey involves the adoption of increasingly advanced materials, especially at the forefront of technology. The whole industry has of course witnessed the shift from planar to three-dimensional structures, in logic, NAND and more recently research into DRAM technologies.

As evidenced by articles from our industry, the move toward three-dimensional designs and other such advancements not only involves vertical scaling but also focuses on enhancing material properties. This is achieved by incorporating exotic materials to improve characteristics such as the high-K constant and work functions of these materials. The introduction of these materials invariably affects the manufacturing process and necessitates precise control.

For instance, when examining layers containing materials like Lanthanum Oxide, a decade ago, it might have been impossible to measure accurately. However, with our latest product, we can do so effectively. This capability assists our customers in fine-tuning this key dipole layer so that they can achieve the intended electrical performance of the end device. Consequently, we are witnessing an even more stark correlation between our film measurements and the device's electrical performance. This not only aids process control by providing feedback to the process teams but also offers insights to the yield teams regarding the expected device performance at the end of the production line.

Now, moving on to the second example, it pertains to our most recent product, the METRION, which is our inline SIMS (Secondary Ion Mass Spectrometry) product. A compelling use case that has recently emerged involves the detection of contaminants within 3D NAND structures. We can profile the composition and measure the thicknesses of discrete layers in-line within the complex stack of 3D NAND tiers. This capability allows us to provide our customers with insights into the overall 3D NAND stack, including the thickness of individual layers and the composition. Moreover, we can identify any contaminants left over from previous process steps, which can have a significant impact on device performance.

“If you encounter a problem, be ready to embrace openness and transparency, as it will ultimately result in the best solution for everyone involved.”

Lastly, let me discuss our in-line Raman Spectroscopy Product, the ELIPSON. We introduced this product in 2020 and it’s really opening up a range of new solutions for our customers by analyzing material properties such as strain, crystallinity phase, surface properties, and another method for composition

We are seeing this product adopted for Logic/Foundry and the Memory customers for monitoring in-die strain, A good example would be its use to predict electron mobility inside the transistor channel for Gate-All-Around devices. This use case gives a reliable indication of the overall device performance at an early stage of the production step. Recently, Nova has extended the Elipson data interpretation package with an algorithm to evaluate the implant-induced doping level in crystalline Silicon or in Silicon-Germanium substrates. This capability is getting a lot of interest as it provides an in-line non-destructive alternative to more invasive measurement techniques.

What will be your piece of advice for peers and aspiring professionals in the industry?

My piece of advice for peers and aspiring professionals in the industry would be to prioritize collaboration. In today's increasingly complex landscape, both process tool vendors and customers are facing intricate challenges. To effectively address these issues, fostering close collaboration is essential. This means working intimately with customers to understand problem statements and sharing data to jointly develop solutions. Over the years, we've witnessed a positive shift towards greater openness and collaboration among customers and the supplier community. Many challenges now require an ecosystem approach, and collaboration is the key to tackling future industry challenges. So, my advice is simple: if you encounter a problem, be ready to embrace openness and transparency, as it will ultimately result in the best solution for everyone involved

The articles from these contributors are based on their personal expertise and viewpoints, and do not necessarily reflect the opinions of their employers or affiliated organizations.